清洗產品:
產品類型1,晶圓環,200只,每筐20圈,4.5小時
Product Type 2 – Wafer Cassette - < 2 per day, 2 cassettes per basket, 1.5 hours.
產品類型2–晶片盒- < 2每天,每筐2盒,1.5小時。
Product Type 3 – Magazine – 100 pcs per day, 8 magazines per basket, 5 hours per day.
產品類型3:雜志社,每天100件,每筐8份雜志,每天5小時。
Product Type 4 – Trays (JEDEC) – 50 trays per day, 30 trays per basket, 2 hours max. per day.
產品類型4–托盤(JEDEC)–每天50盤,30盤,每筐,每天2小時。