一、擴散泵機組特點及用途:
JKT、JK系列油擴散真空泵機組是用來獲得高真空(10-2—10-5Pa)的主要設備。它以油擴散泵為主泵和閥門、水冷擋板、管道、機械真空泵(前級泵)等組成高真空抽氣系統(tǒng),可獲得(10-2—10-4Pa)的工作真空度。
擴散泵機組的特點是抽氣能力大,抽速從190L/S至49000L/S范圍內(nèi)可供選擇;并可長時間穩(wěn)定連續(xù)工作。它被廣泛地應用在電子、化工、冶金、航空、航天、材料、生物醫(yī)藥、原子能、宇宙探測等高科技領域。如各種真空爐、真空鍍膜設備、真空冷凍干燥設備等。典型真空機組是用氣動閥門程序控制。如需其他驅(qū)動方法,請在訂貨時注明。
1、支架 Support | 2、擴散泵 Diffusion pump | 3、前級泵 Backing pump |
4、電磁放氣閥 Solenoid vent valve | 5、波紋管 Bellows | 6、組合閥 Combined valve |
7、高真空閥 High vacuum valve | 8、高真空規(guī) High vacuum gauge | 9、水冷檔板 Water-cooling baffle |
10、低真空規(guī) Low vacuum gauge | 11、充(放)氣閥 Venting valve | |
1、前級泵Backing pump | 2、電磁放氣閥Solenoid vent valve | 3、低真空閥Low vacuum valve |
4、測量接頭 Measurement connector | 5、閥門 Valve | 6、放氣閥Venting valve |
7、高真空閥High vacuum valve | 8、測量接頭Measurement connector | 9、測量接頭Measurement connector |
10、水冷擋板Water-cooling baffle | 11、擴散泵Diffusion pump | 12、支架Support |
二、擴散泵機組的參數(shù):
型號 Model | JK-100 | JK-150 | JK-200 | JK-300 | JK-400 | JK-630 | JK-800 | |
極限壓力(Pa) Ultimate Pressure | 10-4 | |||||||
抽氣速率(1/S) Pumping speed | 100 | 280 | 420 | 900 | 1800 | 4000 | 6500 | |
zui大排氣壓力(Pa) Max. pumping pressure | 35 | |||||||
加熱功率(Kw) Heating power | 0.8 | 1 | 1.5 | 2.1 | 4.8 | 8.4 | 19.8 | |
配用主泵 Matched main pump | K-100 | K-150 | K-200 | K-300 | K-400 | K-630 | K-800 | |
配用擋板 Matched baffle | LB-100 | LB-150A | LB-200B | LB-300A | LB-400 | LB-630 | LB-800 | |
配用閥門 Matched valve | GD-100 | GD-150 | GD-200 | GDQ-300 | GDQ-400 | GDQ-630 | GDQ-800 | |
配用前級泵 Matched backing pump | 2X-4 | 2X-8 | 2X-8 | 2X-15 | 2X-30 | 2X-70 | 2X-70 ZJ-600 | |
接口法蘭 Connecting flange | LF-100 | LF-150 | LF-200 | LF-300 | LF-400 | LF-630 | LF-800 | |
結構尺寸(mm) Structure dimensions | H | 870 | 950 | 1000 | 1300 | 1600 | 2000 | 2400 |
L | 550 | 650 | 750 | 850 | 950 | 1100 |
2000
1、前級泵Backing pump | 2、電磁放氣閥Solenoid vent valve | 3、低真空閥Low vacuum valve |
4、測量接頭 Measurement connector | 5、閥門 Valve | 6、放氣閥Venting valve |
7、高真空閥High vacuum valve | 8、測量接頭Measurement connector | 9、測量接頭Measurement connector |
10、水冷擋板Water-cooling baffle | 11、擴散泵Diffusion pump | 12、支架Support |
型號 Model | JTK-100 | JTK-150 | JTK-200 | JTK-300 | JTK-400 | JTK-500 | |
極限壓力(Pa) Ultimate Pressure | 10-4 | ||||||
抽氣速率(1/S) Pumping speed | 180 | 370 | 600 | 1400 | 2500 | 4000 | |
zui大排氣壓力(Pa) Max. pumping pressure | 35 | ||||||
加熱功率(Kw) Heating power | 0.8 | 1.2 | 1.5 | 2.4 | 4.5 | 6 | |
配用主泵 Matched main pump | TK-100 | TK-150 | TK-200 | TK-300 | TK-400 | TK-500 | |
配用擋板 Matched baffle | LB-100 | LB-150A | LB-200B | LB-300A | LB-400 | LB-500 | |
配用閥門 Matched valve | GD-100 | GD-150 | GD-200 | GDQ-300 | GDQ-400 | GDQ-500 | |
配用前級泵 Matched backing pump | 2X-4 | 2X-8 | 2X-15 | 2X-30 | 2X-70 | 2X-70 ZJ-600 | |
接口法蘭Connecting flange | LF-100 | LF-150 | LF-200 | LF-300 | LF-400 | LF-500 | |
結構尺寸(mm) Structure dimensions | H | 870 | 950 | 1000 | 1300 | 1600 | 1700 |
L | 650 | 750 | 850 | 950 | 1150 | 1500 |